On the 300mm fab floor, the soft bake isn’t a warm-up. It’s the first gate on critical dimension control. A 2°C drift across the wafer can move CD...

In a 7x24 fab, the photoresist bake isn’t just another step. It’s the line between a pattern that works and a wafer that’s scrap....

On the fab floor, the thermal budget for every exposure lot is set in stone. If lamp output drifts or bake temperature wanders, critical dimension...